Chemicals

MNMS Labs provides the following chemicals for use in the lab. We strongly prefer you use our chemicals at MNMS. It minimizes wasted space with extra gallon jugs of chemical only 1 or 2 people use. It's a lot safer only storing 40gallons of chemical vs 80 or 120 so that each user gets their own. Finally, it helps because we know our chemicals better. It's easier to clarify what went wrong and why with our chemicals than with those we are unfamiliar with.

 

Acid
MFG
Distributor
Part Number
Notes
49% HF Links to an external site. JT Baker VWR JT9573-1
BOE Links to an external site. Transene Transene 060-006VLSI1GAL type Improved VLSI grade
Acetic Acid UIUC RAL Storeroom
Hydrochloric Acid UIUC RAL Storeroom
Nitric Acid UIUC RAL Storeroom
Sulfuric Acid UIUC RAL Storeroom
Aluminum Etch Links to an external site. Transene Transene 060-0026000-GAL type A
Chrome Etch Transene Transene 060-9057-GAL type 9057
Copper Etch Links to an external site. Transene Transene 060-006CE-100GAL type CE-100
Gold Etch Links to an external site. Transene Transene 060-001500-GAL type FA
Nickel Etch Links to an external site. Transene Transene 060-0016000-1GAL type TFB

 

Base
MFG
Distributor
Part Number
Notes
Potassium Hydroxide, KOH 40% JT Baker VWR JT3144-3
Ammonium Hydroxide
Hydrogen Peroxide Doe and Ingalls Fisher 08 901 807

 

Base Developer
MFG
Distributor
Part Number
Notes
AZ300MIF Links to an external site. Merck KGaA Integrated Micro AZ 300 MIF Contains TMAH. Toxic
AZ400K Links to an external site. Merck KGaA Integrated Micro AZ 400K Contains KOH. Etches metals
AZ917MIF Links to an external site. Merck KGaA Integrated Micro AZ 917 MIF Contains TMAH. Toxic

 

Photoresist
MFG
Distributor
Part Number
Notes
SPR 220-4.5 Links to an external site. Rohm and Haas Kayaku 10016633 4.5u i-line, pos resist

KMPR 1010 Links to an external site.

Kayaku Y211055 1000L1GL 10u, neg resist

 

Solvent
MFG
Distributor
Part Number
Notes
1165 Remover Links to an external site. Kayaku 10018072
AZ400T Stripper Links to an external site. Merck KGaA Integrated Micro Materials AZ 400T
SU-8 Developer Links to an external site. Kayaku Y020100
Acetone Links to an external site. JT Baker VWR JT9005-5
IPA Links to an external site. JT Baker VWR JT9079-5
Methanol Links to an external site. JT Baker VWR JT9073-5