Deposition
The MNMS Cleanroom holds 3 PVD tools. All three tools are attached to the same load lock and wafer distribution system.
- E-beam Evaporator - Thermionics (Metals and Dielectrics)
- Sputterer - AJA (Metals Only)
- Sputterer - KJL (Metals and Dielectrics)
Materials
Tool
|
Metals Available
|
Dielectrics Available
|
Currently Installed
|
---|---|---|---|
E-beam Evaporator | Ag, Al, Cr, Cu | SiO2, Al2O3, MgO, MgF | Ag, SiO2, Al2O3, MgF |
Sputterer - AJA | Al, Ag, Au, Cr, Cu, Mo, Ni, NiCr, Pt, Sn, Ti, W | Cu, Pt, Cr, Cu, Au, Ti, W, Ni | |
Sputterer - Dielectric | Al, Cu, Cr, Si, NeFeB | SiO2, Al2O3, TiN | Si, NdFeB, TiN |
* Many other materials are available to use in these tools. They just need to be purchased.