Deposition

The MNMS Cleanroom holds 3 PVD tools. All three tools are attached to the same load lock and wafer distribution system. 

Materials

Tool
Metals Available
Dielectrics Available
Currently Installed
E-beam Evaporator Ag, Al, Cr, Cu SiO2, Al2O3, MgO, MgF Ag, SiO2, Al2O3, MgF
Sputterer - AJA Al, Ag, Au, Cr, Cu, Mo, Ni, NiCr, Pt, Sn, Ti, W Cu, Pt, Cr, Cu, Au, Ti, W, Ni
Sputterer - Dielectric Al, Cu, Cr, Si, NeFeB SiO2, Al2O3, TiN Si, NdFeB, TiN

* Many other materials are available to use in these tools. They just need to be purchased.