Metrology at MNMS is sufficient for basic microfabrication needs. With MRL, the Materials Research Laboratory, across the street, it's not particularly savvy for MNMS to stock up on Metrology equipment. MRL is a worldwide recognized institution for materials characterization. Please check out MRL's equipment list if you need more characterization equipment.

That said, MNMS does have a few valuable metrology tools that are directly used during microfabrication. These include:

Goniometer

Contact angle goniometery can be used to identify a few different things.

Liquid on solid - Static contact angle, receding contact angle, advancing contact angle
Liquid on liquid - Surface energy via contact angle measurement

Figure. Biolin Scientific image showing advancing and receding contact angle measurements

Probe Station

The probe station is a useful combination of microscope, substrate state, electric probes with micron scale tip size, and probe stages. The probe station allows us to connect wires to specific places on a sample. It's essentially a DMM (digital multi-meter) for micron scale devices.

What measurements are taken on a probe station varies significantly with what tools are connected to the wires. DMM, power supplies, function generators, ammeters, signal analyzers are all examples of tools that can be wired to the probes. The tool can be used for simply applying a voltage and measuring a current, or more complex tasks like frequency or voltage sweeps while measuring the current response.

Figure. Probe Station example showing probes connecting to device

Profilometer

The profilometer is used to measure the height and width of accessible features on a device. Since the probe is quite large, it can only fit into low aspect ratio or large width features. However, it can be very useful after spinning, lift-off, or etching for feature thickness/depth measurement.

Figure. Example of profilometer probe tip measuring a surface DOI 10.1016/j.measurement.2012.09.022