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MechSE's MNMS Labs contains 4 labs. 3 are in Sydney Lu Mechanical Engineering Building (LuMEB) and 1 is in Mechanical Engineering Laboratory (MEL).
- MNMS Cleanroom (2208 LuMEB)
- Prep Room (2210 LuMEB)
- Microscopy Suite (2209 LuMEB)
- MEL Cleanroom (2232 MEL)
Wiki
People ask questions like, is E-beam or sputtering better for...? What is the smoothest wall we can get on the STS vs Plasmatherm? What dose should I use to get the best liftoff with SPR220-4.5? How smooth is the cut on the Dicing Saw? I'm tired of not knowing the answers.
So, MNMS is implementing an application driven Wiki page. The goal is to document successful processes and further characterize processes for future engineers and scientists. More specifically, MNMS will:
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- Document your fabrication processes.
- We want to know how you succeeded, so we can pass it on to others. Did you finally achieve those 1u pillars, or finally figure out why you get bubbles in the SPR? We all want to know. And not the general way papers do. The specifics, the good and the bad, so we learn together.
- Characterize the tools in MNMS and share the results here.
- I’m shifting my research focus to directly applicable microfabrication data at MNMS. I’ll start with photolithography (exposure, spinning, development), then do ICP DRIE, then RIE, then deposition. My goal is to characterize the tools we have at MNMS so that our new users spend less time characterizing, and more time accomplishing.
- Document your fabrication processes.
Thank you for visiting!
Joe Maduzia
Senior Research Engineer