About

The Karl Suss MJB3 Mask Aligner is designed for high resolution photolithography in a cleanroom environment. It offers flexibility in the handling of irregularly shaped substrates and pieces of differing thicknesses, as well as standard size wafers up to 3in in diameter and masks up to 4 inch x 4 inch. Process settings include soft contact, hard contact, and vacuum contact.

Specifications

Sample Size: up to 3"

Substrate thickness: up to 4.5mm

Mask Size: 3" or 4"

Tool type: Photolithography

Location: Yellow Side

Supervisor: Joe Maduzia

Supervisor Phone: 217-244-6302

Supervisor Email: jmaduzi2@illinois.edu

Description: Mask Aligner

Manufacturer: Karl Suss

Model: MJB3

Reserve it now