About

Smart Print UV is a maskless lithography equipment, based on a DMD projection technology, compatible with a wide range of resists and substrates.

Smart Print UV can produce any 2D shapes down to 1.5um without the need for a hard mask.

The tool allows up to 5in substrates. The top side alignment offers 1um alignment accuracy with <1um stitching precision. The following are the primary parameters that can be changed: objective and exposure time.

Specifications

Exposure Light Source	385nm LED
Alignment Light Source	590 nm LED
Stitching Precision	<1um
Alignment accuracy (for 1cm ^2 area)	1um
Maximum exposure area	118x118 mm^2
Substrate Size	5in
Writing Speed	Up to 220mm^2/min

Tool type: Photolithography

Location: Yellow Side

Supervisor: Joe Maduzia

Supervisor Phone: 217-244-6302

Supervisor Email: jmaduzi2@illinois.edu

Description: Maskless Aligner

Manufacturer: Microlight3D

Model: Smartprint UV Advanced

Reserve it now

Objectives	1x	2.5x	5x	10x
Writing Fields (mm)	10.56 x 5.94	4.2 x 2.4	2.1 x 1.2	1.06 x 0.59
Smallest Features (um)	15	6	3	1.5

Training Materials

KLayout Guide

Video - KLayout Tutorial #1 - Introduction

Video - KLayout Tutorial #2 - Mask Creation

Video - KLayout Tutorial #3 - Alignment